@misc{guenther_determination_of_1996, 
author={Guenther, R., Wiener, G., Knoth, J., Schwenke, H., Bormann, R.},
title={Determination of concentration depth profiles using total-reflection X-ray fluorescence spectrometry in combination with ion-beam etching},
year={1996},
howpublished = {journal article},
note = {Guenther, R.; Wiener, G.; Knoth, J.; Schwenke, H.; Bormann, R.: Determination of concentration depth profiles using total-reflection X-ray fluorescence spectrometry in combination with ion-beam etching. Review of Scientific Instruments. 1996. vol. 67, no. 6, 2332-2336.}}