%0 journal article
%@ 0034-6748
%A Guenther, R., Wiener, G., Knoth, J., Schwenke, H., Bormann, R.

%D 1996
%J Review of Scientific Instruments
%N 6
%P 2332-2336 

%T Determination of concentration depth profiles using total-reflection X-ray fluorescence spectrometry in combination with ion-beam etching
%U 
6 
%X