%0 journal article
%@ 0168-583X
%A Lindner, J. K. N., Klassen, T., Kaat, E. H. te

%D 1991
%J Nuclear Instruments and Methods in Physics Research  B

%P 655-659 

%T Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation
%U 
 
%X