%0 book part
%@ 
%A Schwenke, H., Beaven, P., Knoth, J.

%D 2002
%J Particles on Surfaces 7: Detection, Adhesion and Removal

%P 11-26 

%T Total Reflection and Grazing Emission X-Ray Fluorescence Spectrometry: Assessment of the size of Contaminant Particles on Silicon Wafer Surfaces
%U 
 
%X