%0 conference lecture %@ %A Schwenke, H., Knoth, J., Beaven, P., Kiehn, R., Buhrz, J. %D 2003 %J 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003 %T A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry %U %X