%0 journal article %@ 0584-8547 %A Schwenke, H., Beaven, P., Knoth, J., Jantzen, E. %D 2003 %J Spectrochimica Acta A %N 12 %P 2039-2048 %R doi:10.1016/S0584-8547(03)00188-5 %T A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation %U https://doi.org/10.1016/S0584-8547(03)00188-5 12 %X