%0 conference lecture
%@ 
%A Schwenke, H., Beaven, P., Knoth, J., Jantzen, E.

%D 2002
%J 9th Symposium on Total Reflection X-ray Fluorescence Analysis and Related Methods

 

%T A wavelength-dispersive arrangement for wafer analysis with total reflection X-ray fluorescence spectrometryusing synchrotron radiation
%U 
 
%X