%0 journal article
%@ 1098-0121
%A Zhou, S., Potzger, K., Zhang, G., Muecklich, A., Eichhorn, F., Schell, N., Groetzschel, R., Schmidt, B., Skorupa, W., Helm, M., Fassbender, J.

%D 2007
%J Physical Review  B
%N 8
%P 085203 
%R doi:10.1103/PhysRevB.75.085203
%T Structural and magnetic properties of Mn-implanted Si
%U https://doi.org/10.1103/PhysRevB.75.085203
8 
%X Structural and magnetic properties in Mn-implanted, p-type Si were investigated. High resolution structural analysis techniques such as synchrotron x-ray diffraction revealed the formation of MnSi1.7 nanoparticles already in the as-implanted samples. Depending on the Mn fluence, the size increases from 5 nm to 20 nm  upon rapid thermal annealing. No significant evidence is found for Mn substituting Si sites either in the as-implanted or annealed samples. The observed ferromagnetism yields a saturation moment of 0.21μB per implanted Mn at 10 K, which could be assigned to MnSi1.7 nanoparticles as revealed by a temperature-dependent magnetization measurement.