%0 online contribution %@ %A Hoeche, D., Stoermer, M. %D 2013 %J Hiden Analytical, Surface Science & Materials Analysis, IG20 5 KeV Argon or Oxygen ion source for UHV surface analysis applications %P APO128 %T AP0128 - Magnesium Nitride Phase Formation Through New Ion Beam Implantation Technique %U %X