A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation

Journalpaper

No abstract available.

URL: https://publications.hzg.de/id/21939/
Authors:Schwenke, H., Beaven, P., Knoth, J., Jantzen, E.
Year:2003
In: Spectrochimica Acta A
Volume:58
Issue:12
Pages:2039 - 2048
Type:Journalpaper
ISSN: 0584-8547
Cite as: Schwenke, H.; Beaven, P.; Knoth, J.; Jantzen, E.: A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation . In: Spectrochimica Acta A. Vol. 58 (2003) 12, 2039 - 2048. (DOI: 10.1016/S0584-8547(03)00188-5)