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Journalpaper

A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation

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  • URL: https://publications.hereon.de/id/21939/
  • Authors:Schwenke, H., Beaven, P., Knoth, J., Jantzen, E.
  • Year:2003
  • In: Spectrochimica Acta A
  • Volume:58
  • Issue:12
  • Pages:2039 - 2048
  • Type:Journalpaper
  • ISSN: 0584-8547
  • Cite as: Schwenke, H.; Beaven, P.; Knoth, J.; Jantzen, E.: A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation . In: Spectrochimica Acta A. Vol. 58 (2003) 12, 2039 - 2048. (DOI: 10.1016/S0584-8547(03)00188-5)
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