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Journalpaper

A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry

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  • URL: https://publications.hereon.de/id/22223/
  • Authors:Schwenke, H., Knoth, J., Beaven, P., Kiehn, R., Buhrz, J.
  • Year:2004
  • In: Spectrochimica Acta B
  • Volume:59
  • Issue:8
  • Pages:1159 - 1164
  • Type:Journalpaper
  • ISSN: 0584-8547
  • Cite as: Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. In: Spectrochimica Acta B. Vol. 59 (2004) 8, 1159 - 1164.
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